Title: Micro electric-field sensor based on converse piezoelectric effect Subject: 22nd International Symposium on High Voltage Engineering (ISH 2021) Keywords: Electric-field measurement, micro-fabrication, piezoelectric film, piezoresistive effect Author: Mingyong Xin1, Changbao Xu1, Jianyang Zhu1, Peng Li2, Bing Tian2, Zhong Liu2, Zhifei Han2* Creator: Microsoft® Word 2010 Producer: Zotero (Acrobat Distiller 22.0 (Windows); modified using iText® 7.1.1 ©2000-2018 iText Group NV (AGPL-version)) CreationDate: Tue Apr 12 14:36:45 2022 ModDate: Sun May 5 12:46:11 2024 Tagged: no Form: none Pages: 5 Encrypted: no Page size: 595.32 x 841.92 pts (A4) (rotated 0 degrees) File size: 222324 bytes Optimized: no PDF version: 1.7