Title: Capacitive-Type Two-Axis Accelerometer with Liquid-Type Proof Mass Subject: Advanced Electronic Materials 0.0:1901265 Creator: Adobe InDesign CS6 (Macintosh) Producer: Adobe PDF Library 10.0.1; modified using iText 4.2.0 by 1T3XT CreationDate: Sat Apr 11 11:12:14 2020 ModDate: Wed Apr 15 15:15:51 2020 Tagged: no Form: none Pages: 12 Encrypted: no Page size: 595.276 x 782.362 pts (rotated 0 degrees) File size: 3011359 bytes Optimized: no PDF version: 1.7